JPS6238035B2 - - Google Patents

Info

Publication number
JPS6238035B2
JPS6238035B2 JP16702783A JP16702783A JPS6238035B2 JP S6238035 B2 JPS6238035 B2 JP S6238035B2 JP 16702783 A JP16702783 A JP 16702783A JP 16702783 A JP16702783 A JP 16702783A JP S6238035 B2 JPS6238035 B2 JP S6238035B2
Authority
JP
Japan
Prior art keywords
chuck
gear
plate
circular
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16702783A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6062491A (ja
Inventor
Masahiko Kurano
Sadao Shiroma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP16702783A priority Critical patent/JPS6062491A/ja
Publication of JPS6062491A publication Critical patent/JPS6062491A/ja
Publication of JPS6238035B2 publication Critical patent/JPS6238035B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Gripping On Spindles (AREA)
  • Manipulator (AREA)
  • Coating Apparatus (AREA)
JP16702783A 1983-09-09 1983-09-09 自転及び公転可能な回転式チヤツク Granted JPS6062491A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16702783A JPS6062491A (ja) 1983-09-09 1983-09-09 自転及び公転可能な回転式チヤツク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16702783A JPS6062491A (ja) 1983-09-09 1983-09-09 自転及び公転可能な回転式チヤツク

Publications (2)

Publication Number Publication Date
JPS6062491A JPS6062491A (ja) 1985-04-10
JPS6238035B2 true JPS6238035B2 (en]) 1987-08-15

Family

ID=15842029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16702783A Granted JPS6062491A (ja) 1983-09-09 1983-09-09 自転及び公転可能な回転式チヤツク

Country Status (1)

Country Link
JP (1) JPS6062491A (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62101045A (ja) * 1985-10-28 1987-05-11 Toshiba Corp ウエ−ハの中心合せ装置
JPH0680721B2 (ja) * 1988-05-13 1994-10-12 富士通株式会社 ウェハ位置決め機構
JP5529722B2 (ja) * 2010-12-24 2014-06-25 株式会社フジクラ 取り外し工具及び取り外し方法
JP2021133442A (ja) * 2020-02-25 2021-09-13 富士精工株式会社 ワーク保持装置

Also Published As

Publication number Publication date
JPS6062491A (ja) 1985-04-10

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